1. Kev ua zoo nkauj seem tshuab
Thaum lub tshuab machining qhov tseeb ntawm qhov zoo yog nyob rau hauv nanometers, thiab thaum kawg hauv cov atomic units (atomic lattice spacing yog 0.1 ～ 0.2 nanometers), cov txheej txheem txiav ntawm ultra-nplua qhov tsis tuaj yeem hloov kho. Nws yog qhov yuav tsum tau cia siab rau cov khoom siv tshwj xeeb ua cov txheej txheem, uas yog, daim ntawv thov ntawm lub zog tshuaj. , Lub zog hluav taws xob, lub zog hluav taws xob lossis lub zog hluav taws xob, thiab lwm yam, ua rau cov zog no dhau ntawm cov zog sib txuas ntawm cov atoms, thiaj li tshem tawm cov nplaum, sib khi lossis cov lattice deformation ntawm lub hauv av atoms ntawm qhov chaw ua haujlwm, kom ua tiav lub hom phiaj ntawm kev ua lag luam ultra-fine. Kev ua haujlwm no suav nrog kev siv tshuab mechanochemical polishing, ion sputtering thiab ion implantation, raug hluav taws xob nqaj kis, laser beam ua, hlau evaporation, thiab molecular beam epitaxy.
2. Txiav ntawm cov khoom siv zoo
Mas suav nrog tig zoo, daim iav sib tsoo thiab sib tsoo. Kev tig mus rau lub ntsej muag me me tau ua nyob ntawm lub tshuab dhos zoo nrog precision-av ib leeg siv lead ua pob zeb diamond tig twj. Kev txiav tuab tsuas yog li 1 micron. Nws feem ntau siv rau kev ua cov khoom siv hlau tsis zoo xws li thaj chaw kheej kheej, cov khoom siv ua tsov rog saum npoo av thiab lwm qhov chaw muaj qhov ntsuas nrog cov nplaim siab. Cov. Piv txwv li, daim iav aspheric nrog lub taub ntawm 800 mm rau nuclear fusion installation muaj qhov tseeb siab tshaj plaws ntawm 0.1 microns thiab ib qho kev saum npoo ntawm Rz 0.05 microns.
